It can be compatible with up to 42 inchhotzone to meet the production needs of larger feed volume and larger crystal.A variety of upgradable modules are reserved and the technology is upgradecost-effective, compatible with longer cycle technical route changes.
炉型
Model
炉室尺寸(mm)
Chamber size(mm)
喉口直径(mm)
Throat diameter(mm)
副室尺寸(mm)
Receiving chamberdiameter(mm)
副室延长室尺寸(mm)
Extension chamberlength (mm)
籽晶慢速升降范围(mm/min)
Seed slow liftingand falling range
籽晶快速升降速度(mm/min)
Seed fast liftingand falling range
籽晶旋转速度(rpm)
Seed ratotionspeed（rpm）
坩埚总行程(mm)
Crucible totalmoving distance
坩埚慢速升降范围(mm/min)
Crucible slowlifting and falling range
坩埚快速升降速度(mm/min)
Crucible fastlifting and falling range
坩埚旋转速度(rpm)
Crucible rotationspeed（rpm）
实现更大尺寸规格晶棒生产
Suitabe for lagersize ingot and wafer
可拉制更低头部氧含量产品
Suitable for loweroxygen (head of the crystal) crystal production
更低运行功耗实现降本增效
Suitable forreducing power consumption and improving the efficiency
广泛兼容未来技术升级方向
Suitable for futuretechnology upgrade direction
坩埚装载容量
Crucible lodaingvolume
33吋
33 inch
37吋
37inch
40吋
40 inch
可选配置 Optioanal
“一键拉晶”模块 “One keypulling” module
外置加料装置 OCZ
取晶车/热场转运车 Ingot removing cart/hotzonetransporting cart
专用工装工具 Specialtooling
真空泵 Vacuum pump
热场组件 Hotzone
加热电源 Heating powersupply
低氧方案2.0 Low oxygensolution 2.0
半导体金刚线切片机
Semicondructordiamond wire slicer
类目: 硅(锗) 基 半导体
Category: Silicon (germanium)based semiconductor
研发: 连强智能
R&D: WuxiLianqiang Intelligent Technology Co.,Ltd
参数特征
Parameter
加工硅料长度<450mm
Length ofprocessed silicon material <450mm
加工硅料直径<210mm/310mm
Diameter ofprocessed silicon material <210mm/310mm
图
切割进给速度0~9mm/min
Cutting feedingspeed 0~9mm/min
最大线速度30m/s
Maximum wire speed30m/s
钢线母线直径>中0.045mm
Diamond wirediameter
设备外形尺寸4450x1900x3200mm
Equipment diamension4450x1900x3200mm
设备额定总功率188kW; 设备自重15t
Total rated powerof the equipment : 188kW; Equipment weight : 15t
设计优点
Advantages of ourdesign
设备底座及主轴箱支座均为一体铸造结构
The equipment baseand the spindle box support are cast in one body.
2主轴采用角接触轴承及油气润滑结构，冷却采用单独水箱供水:
The main shaftadopts angular contact bearing and oil-gas lubrication structure, and thecooling adopts a separate water tank:
3) 低惯量轻质一体过轮，为总成结构更换方便:
Low inertialightweight integrated wheels makes it easy for replacement:
4系统采用西门子运动控制系统及电机;
Our system adoptsSiemens motion control system and motor
垂直进给采用铸件附加4导轨机构降低入刀口切片TTV;
The vertical feedingsystem adopts Casting part plus 4 guide rail structure to reduce the cuttingedge TTV;
收放线系统位于设备两侧，安装在一体铸造底座上，结构稳定
The wire take-upand pay-off system is located on both sides of the equipment and is installedon the integrated casting base, which leads to stable structure
张力警重量及悬长小，排线角度接近90°利于排线控制;
The tensionwarning weight and suspension length are small, and the alignment Angle isclose to 90°, which is conducive to the alignmentcontrol.
张力传感器量程为30N控制精度更高:
The tension sensorrange is 30N with higher control accuracy:
硅片表面质量TTV、线痕、翘曲等指标控制优良
Our TTV, linemarks, warping and other indicators are well controlled.
带来利处
which leads tobenifits
08寸切割时间<5小时(注: 现再国内8寸和12寸主要还是砂浆切割为主，8寸砂浆加工在10小时，12寸加工时间在18小时)交付周期
08 inch cuttingtime <5hours (Note: Now 8 inch and 12 inch cutting in China are still mainlymortar cutting, 10 hours for 8 inch mortar processing , 18 hours for 12 inchmortar processing )
主设备预付款到账后 90天
90 days after theadvance payment of the main equipment is received
