Product Detail
Fully automatic silicon wafer degumming machine
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Fully automatic silicon wafer degumming machine

Type:Silicon wafer equipment
Development:Fuchuan Intelligent Technology
Detailed introduction

Parameter attribute

Process control: Brand PLC automatic control, equipment automatic processing

MTBF: >500H

MTTR: <2H

Equipment noise: ≤65 dB

Mounting capacity: ≤200KG operation, (3 sets of manipulators)

Device Orientation: "Right in and left out" takes the person facing the equipment operation surface as the reference direction and "left in and right out" takes the person directly facing the equipment operation surface as the reference direction

Maximum lifting weight: ≤150KG

Production time: Three-shift system (note: 24H/day, 330 days/year)

Capacity: <5 min/pc

Cycle time: <5min/batch (adjustable)

Available ingot: Compatible with crystal holders from 4''-8''

Specification: All tank sizes: 900mm crystal rod (including iron plate, dovetail seat) is available

Dimension: L10000×W2500×H2700

Advantages

Loading and unloading: Manual loading, automatic unloading

Loading trolley: Stainless steel liquid receiving pan at the bottom of the trolley.

Degumming tooling: The plug-free partition is designed for degumming, compatible with □166-230mm, L=850~1000mm silicon rods.

Latest Buchuan manipulator

Thin, simple mechanism, easy maintenance

High-precision servo, accurate positioning

Stable and reliable integrated mechanical pressure basket detection

Traversing with high-precision linear guide rail slider, which runs smoothly.

The upper and middle layers are cylinder-driven spraying swing design (45 degrees adjustable), the lower layer is sprayed at a fixed angle for better spray cleaning.

Liquid level switch metering, liquid replenishment accuracy ±5%

Automatic feeding chute

Benefits

Main features: Degumming the sliced silicon wafers

Large capacity: 10 pc/hr

High utilization rate of equipment: DN50 oversized inlet pipe diameter, DN80 oversized discharge pipe diameter, 1500L oversized spray water storage tank

Well-protected: Mechanical hand pressure basket protection, multiple heating protection mechanisms

It has a high degree of automation: UPTIME ≥ 98%, manual loading, automatic unloading, seamless connection of cleaning and sorting

Oscillating spray structure for more thorough cleaning

Take up small space: 8120*3200*2,750mm (L*W*H), 8% narrower than other equipment

Lead time

New machine order to delivery: 60 days;

On-site installation, commissioning and production: 4 days/unit 2 person