Parameter attribute
①Dimension of machine: 15100mm×2600mm×3000mm (L×W×H)
②Feeding flower basket: 18 pcs/unit
③Loading and unloading trolley: 3 pcs/unit
④Silicon material types: Single crystal offcut, bar, block and top and tail
⑤Silicon material size: Single crystal offcut: Length 850mm (max) single crystal block: 8x8~100xl00mm single crystal rod: φ310x400mm
⑥Loading and unloading mode: Automatic loading and unloading
⑦Cleaning cycle time: <5min/frame (adjustable)
⑧Manipulator rated load: >80kg
⑨Uptime: ≥98% (uptime=monthly device uptime/planned start-up time for the month)
⑩Washing machine quality: The surface of the silicon material is clean and free of impurities, stains, or acid residue
⑪Power supply: 3-phase 5-wire 380VAC50Hz
⑫Machine power: About 170Kw
Advantages
①The basket is moved b gantry trolley, manipulator moves at the top, the transmission mechanism is installed externally to avoid corrosion, and the top of the lifting shaft is separated by organ shield
②The design of the rotating basket is greater than 90kg/frame, and the cleaning cycle is 3-5 min/frame
③Vacuum drying
④HF+HN03 heat release is cooled by the rear cooling circulation tank, and the reagent is refilled with a magnetostrictive rehydration tank.
⑤The loading and unloading trolleys are positioned by pneumatic pull hooks and guide plates, and three rotating baskets are placed on each trolley.
⑥The outer diameter of the basket is 400mm and the length is 1200mm, with the load >90kg. Silicon material.
⑦Feed underwater;
⑧Rinse with pure water and heat to 85°C;
⑨The drying is completed through vacuum by screw positive air pump. It's equipped with pressure sensor, water-cooled motor and screw vacuum machine, and the vacuum is switched and broken by multi-channel ball valve;
⑩A radiant heating tube is installed in the tank for heating, with the heating power of 18kw
⑪Purge pipe is installed at the bottom to cleam the bottom of the basket;
Benefits
①This equipment is transported by automatic manipulator, and is cleaned through rolling basket, which corrodes and cleans silicon materials (block and sheet). It has two process cleaning functions: HF+HN03 mixed acid corrosion cleaning and reagent (weak acid) immersion cleaning. Ensure that the solution and silicon material are not in contact with any metal;
Lead time
①Delivery: New machine order to delivery: 60 days;
②On-site installation, commissioning and production: 4 days/unit 2 person
