Product Detail
Plate type PECVD automatic loading and unloading machine
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Plate type PECVD automatic loading and unloading machine

Type:Battery equipment
Development:Lianzhi Intelligent Technology
Detailed introduction

Parameter attribute

Cell specifications: 11: length 156-159, thickness 140-220um 1: length 166-170, thickness 140-220um

Feeding flower basket specification: 100 slots, slot spacing 4.76mm

Capacity: ≥6000 pc/hr

Uptime: ≥98%

Fragmentation rate: ≤0.05%

Weight: 3200kg

Equipment size: 3800mmx3500mmx2300mm

Power supply: 380V, 50Hz

Equipment power: 18kW

Air source: 0.5-0.7MPa; 1200L/min

Scratch rate: ≤0.02%

Positioning accuracy: ±0.3mm

Compressed air interface: One D16 tube; quick plug interface

Lead time

90 days after advance payment