Parameter attribute
①Cell specifications: 1: length 176-180, thickness 140-220um 2: length 166-172, thickness 140-220um
②Feeding flower basket specification: 100 slots, slot spacing 4.76mm
③Quartz flower basket specifications: 102 slots, slot spacing 2.38mm
④Uptime: ≥98%
⑤Capacity: ≥7000 pc/hr
⑥Fragmentation rate: ≤0.03%
⑦Weight: 3600kg
⑧Equipment size: 7000mmx2550mmx2400mm
⑨Power supply: 220V, 50Hz
⑩Equipment power: 12kW
⑪Air source: 0.4-07MPa; 800L/min
⑫Compressed air interface: one D16 tube; quick plug interface
⑬Optional: Sheet resistivity detection and taking device
Advantages
①Double-layer double-channel
②AGV cache table
③Single raw material loading mode
④Single wrought material unloading mode
⑤Raw and wrought material cycle
⑥Loading and unloading mode
Benefits
①For the horizontal diffusion process, the silicon wafers in the quartz flower basket after the process are automatically taken out and loaded into the basket, and the silicon wafers that have not been processed are automatically taken out of the flower basket and put into the quartz flower basket, and the quartz flower basket is automatically placed in the machine loading and unloading.
Lead time
①90 days after advance payment
