Parameter attribute
①Model: KX320-600;
②Diameter of furnace chamber: φ1300mm;
③Height of lower furnace: 400mm;
④Height of upper furnace: 1249mm;
⑤Location of pyrometer: 836mm above the furnace base;
⑥Diameter of lower auxiliary furnace chamber: φ650mm;
⑦Height of lower auxiliary room: 2000mm;
⑧Diameter of upper auxiliary furnace chamber: 350mm;
⑨Height of upper auxiliary room: 1200mm;
⑩Diameter of rotary disc valve throat: φ650mm;
⑪Lift speed of seed crystal: 0~508mm/hr;
⑫Lift speed of seed crystal (rated): 400mm/min;
⑬Seed rotation speed and precision: 0~30 RPM±1% S.P.or ±0.05RPM, whichever is faster
⑭Crucible lifting speed and accuracy: 0-127 mm/hr ± 1% S.P.or ± 0.25 mm/hr, whichever is faster;
⑮Lift speed of crucible (rated): 127mm/min;
⑯Crucible lifting rotate speed and accuracy: 0-20 RPM ± 1% S.P, or± 0.03 RPM, whichever is faster;
⑰Light port: The light port can be set up on the top of the auxiliary chamber, the upper part of the furnace cover, and the side of the main furnace chamber, with standard CCD temperature measurement system.
Advantages
①The world's first drawing 24'' single crystal furnace;
②The diameter of the throat is 650mm, and can draw up to 600mm single crystal silicon rod;
③It can be set up with built-in quartz cylinder feeder for drawing multiple crystal rods in one furnace;
④It's provided with water cooling plate to improve the production efficiency.
⑤The installation space of the magnetic field lifting mechanism can be reserved.
Lead time
①90 days after advance payment of main equipment (auxiliary equipment and important auxiliary materials depend on market conditions)
