④The pressure requirements of the single crystal furnace exhaust gas recovery pipeline (i.e. pipeline before the compressor intake): ≤0.12MPa (absolute pressure)

⑤Device online rate: ≥95%

⑥The overall recovery rate of argon≥90%

⑦Device testing requirements: Response of the oxygen content detector＜30s.

⑧Leakage rate of the device requires pre-delivery inspection

⑨Positive pressure leak detection: Pressure 0.8Mpa

⑩Device positive pressure leakage rate: ≤0.1 Mpa/10h

⑪Online monitoring: Determine the oxygen content of the equipment according to the real-time monitoring value of the detection module. The main device sets the detection threshold. When the real-time monitoring value exceeds the threshold, the device directly cuts out of the recovery mode and sends alarm.

⑫Heating module service life ≥ 1 year

⑬Machine maintenance cycle: Equipment warranty for 1 year

⑭Circulating water flow: ≥5L/min

⑮Frequency: 50±0.5Hz

⑯Voltage: 380/220V

⑰Rated power＜55KW

⑱Compressed air pressure: ≥0.6MPa

⑲Ammonia pressure: ≥0.5MPa

Advantages

①6 single crystal furnaces, argon flow ≈100L/min/unit; 7 single crystal furnaces, argon flow ≈80L/min/unit

②Argon purification purity: ≥ 99.999%

③Under crystal pulling conditions, the purity is up to 99.999% after argon gas purification, oxygen content ≤ 1.5 ppm, carbon impurities ≤ 1ppm

④Device online rate: ≥ 95%

⑤The overall recovery rate of argon: ≥ 90%

⑥Average operating power consumption of machine≤12KW