Advantages
①Single crystal electromagnetic field: It is suitable for the growth of 4''-6'' semiconductor-grade monocrystalline silicon in different furnace types such as 62, 70, 85, 90, 95, and 100. Control the oxygen content, improve the uniformity of the lateral resistivity of the silicon rod, and improve the quality of the single crystal. It is suitable for the experimental stage of the crystal pulling process, and the magnetic field can be adjusted as required.
②Single crystal permanent magnetic field: It is suitable for the growth of 4''-6'' semiconductor-grade monocrystalline silicon in different furnace types such as 62, 70, 85, 90, 95, and 100. Provide horizontal magnetic field to suppress melt convection, and control the oxygen content, improve the uniformity of the lateral resistivity of the silicon rod, and improve the quality of the single crystal. It's suitable for the mass production stage of process finalization, the magnetic field is constant, and there is no energy consumption.
③Cusp magnetic field: Suitable for 8'' semiconductor-grade single crystal growth in large furnaces above 85. Provide horizontal and vertical and uniform magnetic fields, restrain melt convection from three-dimensional directions, effectively reduce the oxygen content of silicon rods, and improve uniformity. It is the most advanced technology, constant current source design, stable and adjustable magnetic field, IGBT control for easy installation, and save space
④Superconducting magnetic field: Suitable for 8''-12'' large ingot chip-level monocrystalline silicon growth, currently in the development stage
Benefits
①The lateral resistivity uniformity of monocrystalline silicon rods is increased by more than 10%
②Oxygen content of single crystal silicon rod can be controlled <14ppma
③Crystal growth is more stable, free of growth streaks
Partners
①Linton Kayex Technology Co., Ltd.
②Zhejiang MTCN Technology Co., Ltd.
③Tianjin Huan'ou Semiconductor Materials Technology Co., Ltd.
④Ningxia Zhongjing Semiconductor Materials Co., Ltd.
⑤Inner Mongolia Kesheng Technology Co., Ltd.
⑥Ningxia GCL Crystal Technology Development Co., Ltd.
⑦Sichuan Gaoming Technology Co., Ltd.
⑧Liaoning Zhongdianke Semiconductor Materials Co., Ltd.
⑨Jinan Kesheng Electronics Co., Ltd.
⑩Shaanxi Huashan Semiconductor Materials Co., Ltd.
⑪Zhejiang Haina Semiconductor Co., Ltd.
⑫Sisheng Optoelectronics Co., Ltd.
